| Monday 11-4 | |
|---|---|
| Time | Presenter |
| 8:00 | Opening |
| Chair | Britt Turkot, Intel, Leo Pang, D2S |
| 8:15 | Jos Benschop, ASML |
| 9:05 | John Petersen, IMEC |
| 9:30 | Naoya Hashi, DNP |
| 9:55 | P. Jeffery Ungar, D2S |
| 10:20 | BREAK |
| Chair | Yu Cao, Brion; Luigi Capodieci, Motivo |
| 10:50 | John Hu, Nvidia |
| 11:15 | Stacey Bent, Stanford |
| 11:40 | Kenji Yamazoe, TSMC |
| 12:05 | Noriaki Nakayamada, NuFlare |
| 12:30 | Paul Schroeder, GF |
| 12:55 | SPONSORED LUNCH |
| 13:55 | FREE AFTERNOON |
| 17:00 | POSTERS |
| Chair | Da Yang, TEL; Donis Flagello, Nikon |
| 19:00 | Hiroki Miyai, Lasertec |
| 19:25 | Marie Krysak, Intel |
| 19:50 | Yuri Granik, Mentor |
| 20:15 | Shashank Ekbote, Qualcomm |
| 20:40 | Prof. Peter Yuan, UCF |
| 21:05 | Thomas Pistor, Panoramic |
| 21:30 | DAY END |
| Invited Poster Presentations |
|---|
| Yuhang Zhao, CTO of Huahong |
| Alex Tritchkov, Mentor |
| Takahiro Mori, Mitsubishi Chemical |
| Ofir Sharoni, Carl Zeiss |
| Neils, Heidelberg |
| Juhao Wu, SLAC |
| Derren Dunn, IBM |
| Ric Borges, Synopsys |
| Vikram Tolani, KLA |
| Regina Freed, Applied |
| Martin Antoni, Zeiss |
| Luigi Capodieci, Motivo |
| John Peterson, IMEC |
| Shimon Levi, AMAT |
| Kuen-Yu Tsai, National Taiwan University |
| Tuesday 11-5 | |
|---|---|
| Time | Presenter |
| Chair | Noriaki Nakayamada,NuFlare; Mike Rieger |
| 8:00 | Winfried Kaiser, Zeiss |
| 8:50 | Siva Kanakasabapathy, LAM |
| 9:15 | Andy Neureuther, UC Berkeley |
| 9:40 | B G Kim, E-SOL |
| 10:05 | BREAK |
| Chair | Danping Peng, TSMC; Ravi Mahajan, Intel |
| 10:35 | Robert Bristol, Intel |
| 11:00 | Leo Pang, D2S |
| 11:25 | Stephen Renwick, Nikon |
| 11:50 | Andreas Olofsson, DARPA |
| 12:15 | Oliver Patterson, HMI |
| 12:40 | Andreas Erdmann, Fraunhofer |
| 13:05 | LUNCH |
| 14:05 | FREE AFTERNOON |
| 17:00 | POSTERS |
| Chair | Mike Meyer, CDLe; Martin Burkhardt, IBM |
| 19:00 | David Fried, LAM |
| 19:25 | James Shiely, Synopsys |
| 19:50 | Stephen Hsu, ASML |
| 20:15 | Vidya Vaenkatesan, ASML |
| 20:40 | Ivan Ciofi, imec |
| 21:05 | Daniel Chanemougame, TEL |
| 21:30 | Nelson Felix, IBM |
| 21:55 | DAY END |
| Invited Poster Presentations |
|---|
| Yuhang Zhao, CTO of Huahong |
| Alex Tritchkov, Mentor |
| Takahiro Mori, Mitsubishi Chemical |
| Ofir Sharoni, Carl Zeiss |
| Neils, Heidelberg |
| Juhao Wu, SLAC |
| Derren Dunn, IBM |
| Ric Borges, Synopsys |
| Vikram Tolani, KLA |
| Regina Freed, Applied |
| Martin Antoni, Zeiss |
| Luigi Capodieci, Motivo |
| John Peterson, IMEC |
| Shimon Levi, AMAT |
| Kuen-Yu Tsai, National Taiwan University |
| Wednesday 11-6 | |
|---|---|
| Time | Presenter |
| Chair | Thomas Scherübl, Zeiss; Anton Devilliers, TEL |
| 8:00 | Ravi Mahajan, Intel |
| 8:50 | Chris Progler, Photronics |
| 9:15 | Ingo Schulmeyer, Carl Zeiss |
| 9:40 | Michael Yeung, FastLitho |
| 10:05 | BREAK |
| Chair | Pat Martin, AMAT; Jeff Smith, TEL |
| 10:35 | Andrey Rudenko, Dow |
| 11:00 | Samee Rehman, Brion |
| 11:25 | Nakasugi-san, Toshiba (NIL) |
| 11:50 | Mike Green, Photronics |
| 12:15 | Brian Cline, ARM |
| 12:40 | Curtis Zwenger, Amkor |
| 13:05 | LUNCH |
| 18:00 | BANQUET |
| Thursday 11-7 | |
|---|---|
| Time | Presenter |
| Chair | David Fried, LAM; Kafai Lai, IBM |
| 8:00 | Scotten Jones, IC Knowledge |
| 8:50 | Yuki Watanabe, Toshiba |
| 9:15 | Daan Slotboom, ASML |
| 9:40 | Toshiyuki Hisamura, Xilinx |
| 10:05 | BREAK |
| Chair | Bryan Kasprowicz, Photronics; Sterling Watson, KLA |
| 10:35 | Chris Mack, Fractilia |
| 11:00 | Doug Resnick, Canon |
| 11:25 | Martin Burkhardt, IBM |
| 11:50 | Rahul Lakwawat, KLA/IMEC |
| 12:15 | Peng Liu, Synopsys |
| 12:40 | SPONSORED LUNCH |
| Chair | Bernd Geh, Zeiss, Martha Sanchez, IBM |
| 13:40 | Clemens Utzny, AMTC |
| 14:05 | Joe Ervin, Coventor |
| 14:30 | Peter Buck, Mentor |
| 14:55 | J. Alexander Liddle, NIST |
| BREAK | |
| Chair | Lars Liebmann, TEL; Kamal Yadav, I |
| 15:30 | Jeffrey Smith, TEL |
| 15:55 | Pieter Weckx, IMEC |
| 16:20 | Henry Kamberian, Photronics |
| 16:45 | John Randall, Zyvex Lab |
| 17:10 | CLOSING REMARKS |
| 17:25 | CLOSE |